WebJan 1, 2024 · The widely used resonator configurations in silicon micro resonance accelerometers are suspended beam or DETF (double ended tuning fork). In these accelerometers, electrostatic force between capacitor plates is commonly used to drive the silicon resonators into vibration and the capacitance variation of another group of … WebMETHOD Aware of the strong dependence of the thermal stability of MEMS DETF resonators on the doping level of the single crystal silicon, we choose the maximum doping level (Phosphorus 6.6 1019 cm-3) compatible with the employed fabrication process. From [6], it is known that the best thermal stability achievable for such doping level is a 200 ...
The lumped mass-spring-damper model for single-resonator drive method …
Boundary structure and geometry parameters of the Double-Ended-Tuning Fork (DETF) resonator in a micro-accelerometer are investigated. The theoretical vibration model of a DETF resonator is established and verified by the simulation results obtained by finite element method. Uncertainty analysis … See more Based on the theoretical vibration model of the DETF resonator, the stochastic modeling is realized. The detailed procedure of the stochastic modeling is given in Fig. 5. Different input parameter combines randomly … See more The properties of the DETF resonator in this paper are: the Young’s modulus E = 133 GPa, the Poisson’s ratio \nu = 0. 2 7 8 , the material … See more The IQRs of f and S is a function of the COVs of the input parameters L, b, h, and m a. When the COV of one input parameter increases from 0.01 to 0.1, the COVs of other … See more WebJan 4, 2024 · In the closed-loop experiment, the DETF resonator was then embedded in a self-oscillation circuit (see Supplementary Fig. S2a). The circuit can track the characteristic frequency of the DETF and ... sharing childrens books
A Novel Vibration Mode Testing Method for Cylindrical Resonators …
WebSep 1, 2024 · Testing results show a nonlinearity of 0.83% FS, a hysteresis of 0.79% FS, and a repeatability of 0.76% FS. ... The resonant unit of the sensor uses quartz DETF … WebFeb 14, 2014 · A new type of resonant pressure sensor is presented which is realized by combination of a double-ended tuning fork (DETF) quartz resonator and a silicon diaphragm. To examine the feasibility and investigate the performance of this innovation, theoretical analysis and finite elements method are employed to optimize the structure … WebJan 1, 2013 · The DETF resonator is composed of a pair of substantially parallel beams, a slot between the two beams and two mount pads at the ends of the beams. When used as force transducer, the DETF works in-plane with anti-phase flexural mode vibration, which cancels the forces and torques produced at the roots of beams. poppy key chain